4.6 Article

Self-Defined Short Channel Formation With Micromolded Separator and Inkjet-Printed Source/Drain Electrodes in OTFTs

Journal

IEEE ELECTRON DEVICE LETTERS
Volume 32, Issue 12, Pages 1758-1760

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2011.2169646

Keywords

Micromolding; organic thin-film transistor (OTFT); printing; self-aligned; self-defined

Funding

  1. Industrial Strategic Technology Development Program [KI002104]
  2. Ministry of Knowledge Economy (MKE, Korea)
  3. Korea Evaluation Institute of Industrial Technology (KEIT) [KI002104] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)

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We demonstrated fabrication of self-defined short channel using inkjet printing and micromolding in capillary (MIMIC) methods. Self-defined source/drain electrodes were successfully formed when silver ink drops were printed on a silicon dioxide/p+ heavily doped silicon substrate having a prepatterned narrow high-aspect-ratio hydrophobic teflon separator made by MIMIC. We fabricated well-defined channel region of pentacene organic thin film transistors (OTFTs) with 5 and 10 mu m channel lengths, which showed good mobilities of 0.1 similar to 0.2 cm(2)/V . s. Characteristics of the fabricated OTFTs were also analyzed in accordance with channel length and surface wetting properties.

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