Journal
IEEE ELECTRON DEVICE LETTERS
Volume 30, Issue 6, Pages 647-649Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2009.2019973
Keywords
Acoustic resonators; microelectromechanical devices; piezoelectric resonators; Q factor
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Funding
- National Science Foundation [0741834]
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We demonstrate a significant improvement in the quality factor (Q) of film bulk acoustic resonators (FBARs) in liquid environments via the integration of microfluidic channels. Our device consists of a longitudinal-mode excited zinc oxide (ZnO) FBAR and parylene-encapsulated microfluidic channels. Considerable enhancement in the Q of the resonant system is obtained by confining the liquid in the microfluidic channels of thickness comparable to the acoustic wavelength. The improved FBAR achieves Q values of up to 120, which represents an improvement of a factor of eight over those of current state-of-the-art devices.
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