☆ 4.6 Article

Feedforward Control of Piezoactuators in Atomic Force Microscope Systems INVERSION-BASED COMPENSATION FOR DYNAMICS AND HYSTERESIS

IEEE CONTROL SYSTEMS MAGAZINE (2009)

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Journal

IEEE CONTROL SYSTEMS MAGAZINE
Volume 29, Issue 1, Pages 70-82

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/MCS.2008.930922

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Categories

Automation & Control Systems

Funding

  1. Division Of Undergraduate Education
  2. Direct For Education and Human Resources [0852756] Funding Source: National Science Foundation

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