Journal
HIGH PRESSURE RESEARCH
Volume 31, Issue 1, Pages 191-198Publisher
TAYLOR & FRANCIS LTD
DOI: 10.1080/08957959.2011.557073
Keywords
plasma etching; high temperature; laser heating; lithography; designer anvils
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Funding
- U.S. Department of Energy by the Lawrence Livermore National Laboratory [DE-AC52-07NA27344]
- National Science Foundation Earth Sciences [EAR-0622171]
- Department of Energy - Geosciences [DE-FG02-94ER14466]
- U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences [DE-AC02-06CH11357]
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We describe a method for precisely etching small cavities into the culets of diamond anvils for the purpose of providing thermal insulation for samples in experiments at high pressures and high temperatures. The cavities were fabricated using highly directional oxygen plasma to reactively etch into the diamond surface. The lateral extent of the etch was precisely controlled to micron accuracy by etching the diamond through a lithographically fabricated tungsten mask. The performance of the etched cavities in high-temperature experiments in which the samples were either laser heated or electrically heated is discussed.
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