JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Note: The following journal information is for reference only. Please check the journal website for updated information prior to submission.
Journal Title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
J VAC SCI TECHNOL B
ISSN / eISSN
1071-1023
Aims and Scope
Journal of Vacuum Science & Technology B emphasizes processing, measurement and phenomena associated with micrometer and nanometer structures and devices. Processing may include vacuum processing, plasma processing and microlithography among others, while measurement refers to a wide range of materials and device characterization methods for understanding the physics and chemistry of submicron and nanometer structures and devices.
Subject Area
ENGINEERING, ELECTRICAL & ELECTRONIC
NANOSCIENCE & NANOTECHNOLOGY
PHYSICS, APPLIED
CiteScore
-
CiteScore Ranking
-
Web of Science Core Collection
| Science Citation Index Expanded (SCIE) | Social Sciences Citation Index (SSCI) |
|---|---|
| Indexed | - |
| Category (Journal Citation Reports 2024) | Quartile |
|---|---|
| ENGINEERING, ELECTRICAL & ELECTRONIC | Q3 |
| NANOSCIENCE & NANOTECHNOLOGY | Q4 |
| PHYSICS, APPLIED | Q3 |
Country/Area of Publication
UNITED STATES
Publisher
A V S AMER INST PHYSICS
Publication Frequency
Bimonthly
Year Publication Started
1991
Annual Article Volume
197
Open Access
NO
Contact
A V S AMER INST PHYSICS, STE 1 NO 1, 2 HUNTINGTON QUADRANGLE, MELVILLE, USA, NY, 11747-4502
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